ScopusElsevier Scopus
Status
Inactive/Discontinued
Coverage
2002–2006
Source type
Journal
Open access
No
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Journal of Microlithography, Microfabrication and Microsystems
Journal of Microlithography, Microfabrication and Microsystems is not currently indexed in Scopus. Published by SPIE.
Checked against the index lists dated .
ISSN 1537-1646Verify ISSN ↗
Publisher: SPIE
Scopus · Inactive
0
Indexed in
Cost to publish: No APC data — check the publisher
DOAJDirectory of Open Access Journals (live)
Not in DOAJ
Open accessNot registered as fully open access
Not listed in: Web of Science, DOAJ, ABDC, ABS / AJG, FT50, UT Dallas, ONOS (subscription), ONOS (APC covered)
Quick answers
Is Journal of Microlithography, Microfabrication and Microsystems indexed in Scopus?
No — it was previously covered by Scopus but its coverage is now inactive/discontinued (2002–2006).
What is the impact factor of Journal of Microlithography, Microfabrication and Microsystems?
Journal of Microlithography, Microfabrication and Microsystems has no Journal Impact Factor — JIF is published only for journals in the Web of Science Core Collection (SCIE, SSCI, AHCI and ESCI) — and Scopus has not published a current CiteScore for it either. Treat any "impact factor" quoted for this journal elsewhere as unofficial.
Who publishes Journal of Microlithography, Microfabrication and Microsystems and what is its ISSN?
Journal of Microlithography, Microfabrication and Microsystems is published by SPIE. Its ISSN is 1537-1646.
Is Journal of Microlithography, Microfabrication and Microsystems in Web of Science?
No — it is not currently in the Web of Science core collections (SCIE, SSCI, AHCI or ESCI).
Is Journal of Microlithography, Microfabrication and Microsystems open access?
No — it is not registered as an open-access journal in DOAJ or Scopus.
Scopus coverage history
Scopus indexed Journal of Microlithography, Microfabrication and Microsystems for 5 years, between 2002 and 2006. Coverage ended in 2006, 20 years ago, and Scopus now lists the title as inactive.
Is it still publishing? OpenAlex lists 1,685 works and 17,937 citations for the title. OpenAlex attributes papers to this title as late as 2020, 14 years after Scopus coverage ended in 2006. That may reflect a changed ISSN or merged records rather than continued publishing, so confirm the journal's current status directly before submitting.
How well cited is Journal of Microlithography, Microfabrication and Microsystems? — open metrics via OpenAlex
Journal of Microlithography, Microfabrication and Microsystems has an h-index of 48 and a 2-year mean of 0 citations per paper (OpenAlex).
48
h-index
0
2-yr mean citations
591
i10-index
1,685
works indexed
17,937
total citations
Journal of Microlithography, Microfabrication and Microsystems published 31 papers in 2020; its busiest recent year was 2014 with 130. 2026* is the year so far.
Main topics
h-index, i10-index and 2-year mean citedness are open, licence-clear metrics from OpenAlex — not a proprietary impact factor. Updated 2026-10-14.
Are there integrity warnings for Journal of Microlithography, Microfabrication and Microsystems? — indicators, not proof of misconduct
Scopus status: Inactive — coverage ended 2006. No retracted papers are recorded. The Problematic Paper Screener flags none of its papers. These are indicators to check, not findings against the journal.
- Scopus statusInactive — coverage ended 2006
- Retracted papers None recorded
- Problematic Paper Screener flags None flagged
Retractions from OpenAlex; flags from the Problematic Paper Screener (Cabanac, Labbé & Magazinov, CC BY), 2026-09-21 export. A flag marks a paper for a closer look; it is not a finding against the journal.
Official sources & links
Community experience: reader comments on this journal
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SPIE has 17 other titles in our data; 14 are currently indexed in Scopus.
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Index data is curated from public sources (Scopus, Web of Science, ABDC, FT50, UT Dallas, DOAJ). CiteScore and quartiles reflect the latest available Scopus release. Always verify a journal's current status on its official source before submitting.
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