ScopusElsevier Scopus
Status
Inactive/Discontinued
Coverage
1983–1985
Source type
Journal
Open access
No
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Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena
Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena is not currently indexed in Scopus. Published by American Institute of Physics.
Checked against the index lists dated .
ISSN 0734-211XVerify ISSN ↗2327-9877Verify ISSN ↗
Publisher: American Institute of Physics
Scopus · Inactive
0
Indexed in
Cost to publish: No APC data — check the publisher
DOAJDirectory of Open Access Journals (live)
Not in DOAJ
Open accessNot registered as fully open access
Not listed in: Web of Science, DOAJ, ABDC, ABS / AJG, FT50, UT Dallas, ONOS (subscription), ONOS (APC covered)
Quick answers
Is Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena indexed in Scopus?
No — it was previously covered by Scopus but its coverage is now inactive/discontinued (1983–1985).
What is the impact factor of Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena?
Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena has no Journal Impact Factor — JIF is published only for journals in the Web of Science Core Collection (SCIE, SSCI, AHCI and ESCI) — and Scopus has not published a current CiteScore for it either. Treat any "impact factor" quoted for this journal elsewhere as unofficial.
Who publishes Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena and what is its ISSN?
Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena is published by American Institute of Physics. Its print ISSN is 0734-211X and its online ISSN is 2327-9877.
Is Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena in Web of Science?
No — it is not currently in the Web of Science core collections (SCIE, SSCI, AHCI or ESCI).
Is Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena open access?
No — it is not registered as an open-access journal in DOAJ or Scopus.
Scopus coverage history
Scopus indexed Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena for 3 years, between 1983 and 1985. Coverage ended in 1985, 41 years ago, and Scopus now lists the title as inactive.
Is it still publishing? OpenAlex lists 2,702 works and 63,346 citations for the title. Its papers appear as late as 1990, 5 years after Scopus coverage ended in 1985. That pattern fits a journal Scopus stopped indexing while it kept publishing, but it can also come from a changed ISSN or merged records. Confirm the journal's current status before submitting.
How well cited is Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena? — open metrics via OpenAlex
Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena has an h-index of 104 and a 2-year mean of 0 citations per paper (OpenAlex).
104
h-index
0
2-yr mean citations
1,524
i10-index
2,702
works indexed
63,346
total citations
Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena published 378 papers in 1990; its busiest recent year was 1988 with 474. 2026* is the year so far.
Main topics
h-index, i10-index and 2-year mean citedness are open, licence-clear metrics from OpenAlex — not a proprietary impact factor. Updated 2026-10-14.
Are there integrity warnings for Journal of Vacuum Science and Technology B: Microelectronics Processing and Phenomena? — indicators, not proof of misconduct
Scopus status: Inactive — coverage ended 1985. No retracted papers are recorded. The Problematic Paper Screener flags none of its papers. These are indicators to check, not findings against the journal.
- Scopus statusInactive — coverage ended 1985
- Retracted papers None recorded
- Problematic Paper Screener flags None flagged
Retractions from OpenAlex; flags from the Problematic Paper Screener (Cabanac, Labbé & Magazinov, CC BY), 2026-09-21 export. A flag marks a paper for a closer look; it is not a finding against the journal.
Official sources & links
Community experience: reader comments on this journal
More from American Institute of Physics
American Institute of Physics has 47 other titles in our data; 29 are currently indexed in Scopus.
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Index data is curated from public sources (Scopus, Web of Science, ABDC, FT50, UT Dallas, DOAJ). CiteScore and quartiles reflect the latest available Scopus release. Always verify a journal's current status on its official source before submitting.
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