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Journal of Vacuum Science and Technology B
Journal of Vacuum Science and Technology B is Scopus-indexed (Q2, CiteScore 2.5), WoS SCIE. It is covered by India's One Nation One Subscription scheme for reading access. Published by AVS Science and Technology Society.
ONOS · SubscriptionOne Nation One Subscription — full-text access
This journal is part of the ONOS national subscription — readers at an ONOS-subscribed Indian institution get full-text access to its articles at no cost.
Access depends on your institution’s ONOS participation; the subscribed title list is subject to revision.
Not listed in:DOAJ, ABDC, ABS / AJG, FT50, UT Dallas, ONOS (APC covered)
Quick answers
Is Journal of Vacuum Science and Technology B indexed in Scopus?
Yes — actively indexed in Scopus, coverage 2009–present (also 1991–1992), best quartile Q2, CiteScore 2.5.
What quartile is Journal of Vacuum Science and Technology B in Scopus?
Journal of Vacuum Science and Technology B is Q2 in Instrumentation (rank 99 of 206), Q3 in Electrical and Electronic Engineering (rank 545 of 1030) and Q3 in Electronic, Optical and Magnetic Materials (rank 198 of 318), by CiteScore 2025. It is ranked in 6 subject areas in all.
What is the impact factor of Journal of Vacuum Science and Technology B?
Journal of Vacuum Science and Technology B is indexed in the Science Citation Index Expanded, so it may have a Journal Impact Factor in Clarivate's Journal Citation Reports. JCR is paid, so check it for the current value. The closest free measure is its Scopus CiteScore 2.5, which places it in quartile Q2 at the 52nd percentile of its subject. Its SCImago Journal Rank (SJR, a free Scopus-based metric) is 0.359, quartile Q3, with an H-index of 131.
Who publishes Journal of Vacuum Science and Technology B and what is its ISSN?
Journal of Vacuum Science and Technology B is published by AVS Science and Technology Society. Its print ISSN is 2166-2746 and its online ISSN is 2166-2754.
Is Journal of Vacuum Science and Technology B covered under ONOS in India?
Yes. It is part of the One Nation One Subscription (ONOS) national subscription, so readers at participating Indian institutions get its full text. ONOS does not cover its article processing charge.
Is Journal of Vacuum Science and Technology B in Web of Science?
Yes — indexed in the Science Citation Index Expanded.
Is Journal of Vacuum Science and Technology B open access?
No — it is not registered as an open-access journal in DOAJ or Scopus.
How well cited is Journal of Vacuum Science and Technology B? — open metrics via OpenAlex
Journal of Vacuum Science and Technology B has an h-index of 63 and a 2-year mean of 2.12 citations per paper (OpenAlex). Its Scopus CiteScore is 2.5, quartile Q2. On 2-year citations it ranks #61 of 146 Scopus journals in Instrumentation.
63
h-index
2.12
2-yr mean citations
1,493
i10-index
4,540
works indexed
47,298
total citations
2-yr mean citations, among Scopus journals in the same subject
#61 of 146Top 42%Instrumentation
#335 of 744Top 46%Electrical and Electronic Engineering
#151 of 269Bottom 44%Electronic, Optical and Magnetic Materials
Papers published per year
Journal of Vacuum Science and Technology B published 182 papers in 2025; its busiest recent year was 2017 with 260. 2026* is the year so far.
Main topics
Semiconductor materials and devicesAdvancements in Photolithography TechniquesIntegrated Circuits and Semiconductor Failure AnalysisGaN-based semiconductor devices and materials
h-index, i10-index and 2-year mean citedness are open, licence-clear metrics from OpenAlex — not a proprietary impact factor. The subject rank counts only journals that OpenAlex has a figure for; it is not a Scopus or Clarivate ranking. Updated 2026-10-14.
Who publishes in Journal of Vacuum Science and Technology B? — latest 99 articles, 2026
In its latest 99 research articles (2026), authors are most often from China (27.8%), United States (23.1%) and Japan (6.6%).
Countries are counted fractionally, so a paper by authors from two countries counts half to each.
Are there integrity warnings for Journal of Vacuum Science and Technology B? — indicators, not proof of misconduct
Scopus status: Active. 2 retracted papers are recorded (0.4 per 1,000 papers). The Problematic Paper Screener flags none of its papers. These are indicators to check, not findings against the journal.
Scopus statusActive
Retracted papers2 · 0.4 per 1,000 papers
Problematic Paper Screener flagsNone flagged
Retractions from OpenAlex; flags from the Problematic Paper Screener (Cabanac, Labbé & Magazinov, CC BY), 2026-09-21 export. A flag marks a paper for a closer look; it is not a finding against the journal.
Index data is curated from public sources (Scopus, Web of Science, ABDC, FT50, UT Dallas, DOAJ). CiteScore and quartiles reflect the latest available Scopus release. Always verify a journal's current status on its official source before submitting.
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